TY  - JOUR
TI  - The Attitude of ZnO/Al2O3 Film Produced by Ultrasonic Spray Pyrolysis under Thermal Annealing
AB  - Impact of annealing on structural, morphological, elemental, electrical, and optical properties of bilayer ZnO/Al2O3 films has been investigated. Bilayer films have been deposited on microscope slides by ultrasonic spray pyrolysis method at 350°C substrate temperature. Then, those films have been annealed at 400°C, 500°C, and 600°C under atmospheric conditions, respectively. Structural analysis has revealed that bilayer films have polycrystalline with hexagonal wurtzite structures of ZnO. Also, there is no other structures have been found like Zn-Al, etc. Morphological and elemental analyses have been presented that the alterations of surface, and diffusions of Al to ZnO layer. Cross-sectional images have revealed the film thicknesses are between 0.78-1.56 m. Resistivity values of the films have been obtained between 6.78x101 ohm- cm to 3.29 x101 ohm-cm. Optical method has been used for the calculation of optical band gap values of the films which are found between 3.17-3.25 eV. The results have revealed that annealing leads to diffusion from the bottom layer of Al2O3 of the material to the upper layer, ZnO. In addition, the properties of ZnO/Al2O3 films are still the focus of researchers.
AU  - Cetinkaya, Cemil
AU  - POLAT GONÜLLÜ, MERYEM
AU  - ÇAKIL, Damla Dilara
DO  - 10.29109/gujsc.1137863
PY  - 2022
JO  - Gazi Üniversitesi Fen Bilimleri Dergisi Part C: Tasarım ve Teknoloji
VL  - 10
IS  - 4
SN  - 2147-9526
SP  - 1026
EP  - 1036
DB  - TRDizin
UR  - http://search/yayin/detay/1159799
ER  -