Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures
Yıl: 2022 Cilt: 25 Sayı: 4 Sayfa Aralığı: 1613 - 1619 Metin Dili: İngilizce DOI: 10.2339/politeknik.787700 İndeks Tarihi: 06-04-2023
Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures
Öz: In this study, three samples of GaN/AlInN/AlN/Al2O3 high electron mobility (HEMT) structures are investigated with high resolution X-ray diffraction (HR-XRD) technique. Peak positions and peak broadenings are used in calculations, gained from rocking curves. Structural quality is determined from symmetric and asymmetric peak planes. Mosaic defects such as treadening dilocations (TDs), tilt and twist angles, lateral and vertical crystallite lengths are determined by using Williamson Hall (WH) method. In addition to these, surface morphology is also investigated by atomic force microscopy (AFM). It is noticed that crystal quality of epitaxial layers decrease in the order of samples C, B and A. Al compositions for samples A, B and C are found as %87.4, %86.6 and %86.4, respectively by using Vegard’s law.
Anahtar Kelime: GaN/AlInN/AlN/Safir HEMT Yapılar için Mozaik Kusur ve AFM Çalışması
Öz: Bu çalışmada GaN/AlInN/AlN/Al2O3 yüksek elektron mobiliteli transistör (HEMT) yapıları üç numune olacak şekilde, yüksek çözünürlüklü X-ışınları kırınımı (HR-XRD) tekniği ile incelendi. Hesaplamalarda roking eğrilerinden elde edilen pik pozisyonları ve pik genişlemeleri kullanıldı. Yapısal kalite simetrik ve asimetrik pik düzlemlerinden faydalanılarak belirlendi. Tedirgin edici dislokasyonlar (TDs), eğim ve burkulma açıları, yanal ve düşey kristal uzunlukları gibi mozaik kusurlar Wiiliamson Hall (WH) metodu kullanılarak saptandı. Bunlara ilave olarak, yüzey morfolojisi atomik kuvvet mikroskopisi (AFM) yöntemiyle belirlendi. Epitaksiyel tabakaların kristal kalitesinin örnek C, B ve A sırasına göre düştüğü farkedildi. Örnekler A, B ve C için Al kompozisyonlarının sırasıyla %87.4, %86.6 ve %86.4 olduğu Vegard yasası kullanılarak belirlendi.
Anahtar Kelime: Belge Türü: Makale Makale Türü: Araştırma Makalesi Erişim Türü: Erişime Açık
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| APA | BİLGİLİ A, Hkn E, öztürk m, Ozcelik S, Ozbay E (2022). Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. , 1613 - 1619. 10.2339/politeknik.787700 |
| Chicago | BİLGİLİ Ahmet Kürşat,Hkn Erkan,öztürk mustafa kemal,Ozcelik Suleyman,Ozbay Ekmel Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. (2022): 1613 - 1619. 10.2339/politeknik.787700 |
| MLA | BİLGİLİ Ahmet Kürşat,Hkn Erkan,öztürk mustafa kemal,Ozcelik Suleyman,Ozbay Ekmel Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. , 2022, ss.1613 - 1619. 10.2339/politeknik.787700 |
| AMA | BİLGİLİ A,Hkn E,öztürk m,Ozcelik S,Ozbay E Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. . 2022; 1613 - 1619. 10.2339/politeknik.787700 |
| Vancouver | BİLGİLİ A,Hkn E,öztürk m,Ozcelik S,Ozbay E Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. . 2022; 1613 - 1619. 10.2339/politeknik.787700 |
| IEEE | BİLGİLİ A,Hkn E,öztürk m,Ozcelik S,Ozbay E "Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures." , ss.1613 - 1619, 2022. 10.2339/politeknik.787700 |
| ISNAD | BİLGİLİ, Ahmet Kürşat vd. "Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures". (2022), 1613-1619. https://doi.org/10.2339/politeknik.787700 |
| APA | BİLGİLİ A, Hkn E, öztürk m, Ozcelik S, Ozbay E (2022). Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. Politeknik Dergisi, 25(4), 1613 - 1619. 10.2339/politeknik.787700 |
| Chicago | BİLGİLİ Ahmet Kürşat,Hkn Erkan,öztürk mustafa kemal,Ozcelik Suleyman,Ozbay Ekmel Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. Politeknik Dergisi 25, no.4 (2022): 1613 - 1619. 10.2339/politeknik.787700 |
| MLA | BİLGİLİ Ahmet Kürşat,Hkn Erkan,öztürk mustafa kemal,Ozcelik Suleyman,Ozbay Ekmel Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. Politeknik Dergisi, vol.25, no.4, 2022, ss.1613 - 1619. 10.2339/politeknik.787700 |
| AMA | BİLGİLİ A,Hkn E,öztürk m,Ozcelik S,Ozbay E Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. Politeknik Dergisi. 2022; 25(4): 1613 - 1619. 10.2339/politeknik.787700 |
| Vancouver | BİLGİLİ A,Hkn E,öztürk m,Ozcelik S,Ozbay E Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures. Politeknik Dergisi. 2022; 25(4): 1613 - 1619. 10.2339/politeknik.787700 |
| IEEE | BİLGİLİ A,Hkn E,öztürk m,Ozcelik S,Ozbay E "Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures." Politeknik Dergisi, 25, ss.1613 - 1619, 2022. 10.2339/politeknik.787700 |
| ISNAD | BİLGİLİ, Ahmet Kürşat vd. "Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures". Politeknik Dergisi 25/4 (2022), 1613-1619. https://doi.org/10.2339/politeknik.787700 |
