@article{Ozbay2022_1162388,
author={Ekmel Ozbay and Ahmet Kürşat BİLGİLİ and Erkan Hkn and Suleyman Ozcelik and mustafa kemal öztürk},
title={Mosaic Defect and AFM Study on GaN/AlInN/AlN/Sapphire HEMT Structures},
year={2022},
journal={Politeknik Dergisi},
issn={1302-0900},
volume={25},
number={4},
url={http://search/yayin/detay/1162388}
}