@article{AY2018_326965,
author={Feridun AY},
title={INVESTIGATION OF FOCUSED ION BEAM IMPLANTATION PROFILE OF Ga+ IONS FOR APPLICATIONS IN SILICON PHOTONICS},
year={2018},
journal={Eskişehir Technical University Journal of Science and and Technology A- Applied Sciences and Engineering},
issn={2667-4211},
volume={19},
number={4},
url={http://search/yayin/detay/326965}
}