@article{Ataşer2021_424264,
author={Tuğçe Ataşer and Suleyman Ozcelik and D. DEMİR and Ahmet Kürşat BİLGİLİ and mustafa kemal öztürk},
title={Mosaic defects of AlN buffer layers in GaN/AlN/4H-SiC epitaxial structure},
year={2021},
journal={Politeknik Dergisi},
issn={1302-0900},
volume={24},
number={2},
url={http://search/yayin/detay/424264}
}