Yıl: 2020 Cilt: 4 Sayı: 1 Sayfa Aralığı: 12 - 17 Metin Dili: İngilizce İndeks Tarihi: 29-07-2022

MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER

Öz:
 This study aims to fabricate Electro-Thermal Micro Actuator with a support structure by using the Two-Photon Polymerization (2PP) technique based 3D printer. This study was carried out with the 3D printer which is possible to fabricate the actuator which can be fabricated by the traditional Micro Electro Mechanical System (MEMS) methods. Due to the high cost of traditional MEMS methods, difficult and excessive processing, many studies have been carried out for new fabrication methods. 2PP is the most widely used and developed method of production. With this method, direct fabrication up to nano level is possible. Also, many chemical processes used in traditional methods will not be applied using 2PP based 3D printers. The design of the bi-directional movable Electro-Thermal Micro Actuator is carried out in this study. Supporting structures with a diameter of 2 microns allow the Actuator to be fabricated without breakage. 2PP method of the 2-micron length of the very easy and low-cost production was seen in this study. Thanks to this method, traditional MEMS production methods will be replaced by 3D printers in the following years.
Anahtar Kelime: 3dprinting Fabrication 2PP MEMS

Belge Türü: Makale Makale Türü: Derleme Erişim Türü: Erişime Açık
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APA ERTUĞRUL I, akkus n, AYGÜL E, yalçınkaya s (2020). MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. , 12 - 17.
Chicago ERTUĞRUL Ishak,akkus nihat,AYGÜL Ebuzer,yalçınkaya senai MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. (2020): 12 - 17.
MLA ERTUĞRUL Ishak,akkus nihat,AYGÜL Ebuzer,yalçınkaya senai MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. , 2020, ss.12 - 17.
AMA ERTUĞRUL I,akkus n,AYGÜL E,yalçınkaya s MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. . 2020; 12 - 17.
Vancouver ERTUĞRUL I,akkus n,AYGÜL E,yalçınkaya s MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. . 2020; 12 - 17.
IEEE ERTUĞRUL I,akkus n,AYGÜL E,yalçınkaya s "MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER." , ss.12 - 17, 2020.
ISNAD ERTUĞRUL, Ishak vd. "MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER". (2020), 12-17.
APA ERTUĞRUL I, akkus n, AYGÜL E, yalçınkaya s (2020). MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. International Journal of 3D Printing Technologies and Digital Industry, 4(1), 12 - 17.
Chicago ERTUĞRUL Ishak,akkus nihat,AYGÜL Ebuzer,yalçınkaya senai MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. International Journal of 3D Printing Technologies and Digital Industry 4, no.1 (2020): 12 - 17.
MLA ERTUĞRUL Ishak,akkus nihat,AYGÜL Ebuzer,yalçınkaya senai MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. International Journal of 3D Printing Technologies and Digital Industry, vol.4, no.1, 2020, ss.12 - 17.
AMA ERTUĞRUL I,akkus n,AYGÜL E,yalçınkaya s MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. International Journal of 3D Printing Technologies and Digital Industry. 2020; 4(1): 12 - 17.
Vancouver ERTUĞRUL I,akkus n,AYGÜL E,yalçınkaya s MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. International Journal of 3D Printing Technologies and Digital Industry. 2020; 4(1): 12 - 17.
IEEE ERTUĞRUL I,akkus n,AYGÜL E,yalçınkaya s "MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER." International Journal of 3D Printing Technologies and Digital Industry, 4, ss.12 - 17, 2020.
ISNAD ERTUĞRUL, Ishak vd. "MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER". International Journal of 3D Printing Technologies and Digital Industry 4/1 (2020), 12-17.