TY  - JOUR
TI  - A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers
AB  - Micro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage in the development of new generation MEMS-based devices is the design and optimization stage. However, device design and optimization processes are developed in a laboratory by empirical approaches. This causes time loss and creates an unnecessary waste of resources. In this study, it is aimed to design and analyze two gas sensors based on ZnO and TiO2 sensing layers. Electro-thermal analysis of the sensor structure was carried out at room temperature and high temperature (294,15K-573,15K) and heat transfer parameters were compared. According to the simulation results, it is obtained that, as the applied temperature increases to the sensor, the temperature over the sensing layer increases linearly. It is compatible with the literature. The temperature on the ZnO surface increases to three times the TiO2 surface temperature. The heat transfer results obtained will be used as a guide for device design and optimization in future works. In this way, as a result of numerical analysis, a MEMS-based device will be produced with high accuracy. Thus, time and resources will be saved.
AU  - YUCE, Huseyın
AU  - KONUK EGE, Gözde
AU  - GENÇ, GARİP
DO  - 10.51354/mjen.854265
PY  - 2021
JO  - Manas Journal of Engineering
VL  - 9
IS  - 1
SN  - 1694-7398
SP  - 37
EP  - 44
DB  - TRDizin
UR  - http://search/yayin/detay/488770
ER  -