The objective of this project is to develop a lab-on-a-chip (LOC) device which can manipulate microparticles using dielectrophoretic (DEP) and acoustic methods. This device enables integrated particle wash and particle separation. The manipulation of particles for separation has been performed by DEP and the manipulation of particles for wash has been performed by DEP by acoustic method. Firstly, stand alone units have been designed and tested for DEP and acoustic manipulation. At the final step, an integrated device has been designed, fabricated and tested. For the matching of the throughput of the acoustic and DEP unit, 3-dimensional (3-D) side-wall electrodes have been implemented of the DEP. For the acoustic manipulation piezoelectric materials (PZT) have been utilized. The acoustic manipulation has been studied both for separation and concentration of particles; however, only the integration and the separation has been performed at the final device. In this project, computational models for the simulation of DEP and acoustic based particle manipulation have been developed and compared against the experimental results. The non-uniform electric field inside the device has been generated by means of electrodes which are embedded inside the microchannel, the acoustic force on the other hand has been generated with piezoelectric elements embedded in the device. Particle separation has been achieved with the DEP force, and particle wash and particle concentration has been achieved with the acoustic force. The device is designed to have stable, robust and highly repeatable manufacturability. For the fabrication of the microfluidic devices, mainly micro-machining has been utilized. The proposed fabrication techniques have been presented as an alternative for the available techniques in the literature for the fabrication of acoustic and DEP based microfluidc devices. To the best of authors’ knowledge, an integrated LOC device which combines acoustic and DEP manipulation does not exist in the open literature. In this sense, our project contributes to the microfluidics literature